{"id":236,"date":"2026-03-13T10:55:05","date_gmt":"2026-03-13T02:55:05","guid":{"rendered":"http:\/\/111.229.143.96\/?p=236"},"modified":"2026-03-13T10:55:05","modified_gmt":"2026-03-13T02:55:05","slug":"ebsd%e6%b5%8b%e8%af%95%e4%bb%8b%e7%bb%8d","status":"publish","type":"post","link":"https:\/\/www.huolanlab.com\/index.php\/2026\/03\/13\/ebsd%e6%b5%8b%e8%af%95%e4%bb%8b%e7%bb%8d\/","title":{"rendered":"EBSD\u6d4b\u8bd5\u4ecb\u7ecd"},"content":{"rendered":"\n

\u7535\u5b50\u80cc\u6563\u5c04\u884d\u5c04\uff08<\/strong>Electron Backscatter Diffraction<\/strong>\uff0c\u7b80\u79f0<\/strong>EBSD<\/strong>\uff09<\/strong>\uff0c\u662f\u5b89\u88c5\u5728\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c\uff08SEM\uff09\u4e0a\u7684\u4e00\u4e2a\u9644\u4ef6\u5206\u6790\u6280\u672f\uff0c\u7528\u4e8e\u5bf9\u5757\u72b6\u6837\u54c1\u7684\u6676\u4f53\u5b66\u7279\u6027<\/strong>\u8fdb\u884c\u663e\u5fae\u5c3a\u5ea6\u7684\u5b9a\u91cf\u5206\u6790\u3002<\/p>\n\n\n\n

\u5de5\u4f5c\u539f\u7406<\/strong>\uff1a\u5f53\u805a\u7126\u7535\u5b50\u675f\u5165\u5c04\u5230\u503e\u659c\u7ea670\u00b0\u7684\u6837\u54c1\u8868\u9762\u65f6\uff0c\u80cc\u6563\u5c04\u7535\u5b50\u4e0e\u6676\u9762\u53d1\u751f\u5e03\u62c9\u683c\u884d\u5c04\uff0c\u5728\u8367\u5149\u5c4f\u4e0a\u5f62\u6210\u7531\u76f8\u4ea4\u83ca\u6c60\u7ebf\u7ec4\u6210\u7684\u7535\u5b50\u80cc\u6563\u5c04\u884d\u5c04\u82b1\u6837<\/strong>\u3002\u901a\u8fc7\u81ea\u52a8\u6807\u5b9a\u8fd9\u4e9b\u83ca\u6c60\u5e26\u7684\u4f4d\u7f6e\u3001\u5bbd\u5ea6\u548c\u89d2\u5ea6\u5173\u7cfb\uff0c\u53ef\u786e\u5b9a\u8be5\u5fae\u533a\u7684\u6676\u4f53\u53d6\u5411\u3001\u7269\u76f8\u79cd\u7c7b\u53ca\u6676\u4f53\u5b8c\u6574\u6027\u3002<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

EBSD<\/strong>\u662f\u76ee\u524d\u552f\u4e00\u80fd\u591f\u5728\u663e\u5fae\u5c3a\u5ea6\u4e0a\uff0c\u5c06\u5fae\u89c2\u7ec4\u7ec7\u5f62\u8c8c\u4e0e\u6676\u4f53\u5b66\u4fe1\u606f\uff08\u53d6\u5411\u3001\u7ec7\u6784\u3001\u6676\u754c\u3001\u7269\u76f8\u7b49\uff09\u76f4\u63a5\u5173\u8054\u7684\u5b9a\u91cf\u5206\u6790\u6280\u672f\u3002<\/strong>\u5e7f\u6cdb\u5e94\u7528\u4e8e\u91d1\u5c5e\u3001\u534a\u5bfc\u4f53\u3001\u5730\u8d28\u3001\u65b0\u80fd\u6e90\u7b49\u9886\u57df\uff0c\u7528\u4e8e\u7814\u7a76\u6676\u4f53\u53d6\u5411\u3001\u7ec7\u6784\u6f14\u5316\u3001\u6676\u754c\u7279\u5f81\u53ca\u5fae\u533a\u7269\u76f8\u5206\u5e03\u3002<\/p>\n\n\n\n

EBSD<\/strong>\u80fd\u591f\u83b7\u53d6\u7684\u5173\u952e\u4fe1\u606f<\/strong><\/strong><\/p>\n\n\n\n

\u4fe1\u606f\u7ef4\u5ea6<\/strong><\/strong><\/td>\u5177\u4f53\u5185\u5bb9<\/strong><\/strong><\/td>\u6750\u6599\u5b66\u610f\u4e49<\/strong><\/strong><\/td><\/tr><\/thead>
\u6676\u4f53\u53d6\u5411<\/strong><\/td>\u5355\u70b9\u53d6\u5411\u3001\u53d6\u5411\u5206\u5e03\u3001\u53d6\u5411\u5dee\u89d2\u5ea6<\/td>\u7ec7\u6784\u5206\u6790\u3001\u5404\u5411\u5f02\u6027\u7814\u7a76\u3001\u53d8\u5f62\u673a\u5236<\/td><\/tr>
\u6676\u7c92\u7279\u5f81<\/strong><\/td>\u6676\u7c92\u5c3a\u5bf8\u3001\u5f62\u6001\u3001\u5206\u5e03\u7edf\u8ba1<\/td>\u7ec4\u7ec7\u5747\u5300\u6027\u8bc4\u4f30\u3001\u518d\u7ed3\u6676\u7a0b\u5ea6\u5224\u5b9a<\/td><\/tr>
\u6676\u754c\u7279\u5f81<\/strong><\/td>\u6676\u754c\u7c7b\u578b\uff08\u5c0f\u89d2\/\u5927\u89d2\uff09\u3001\u7279\u6b8a\u6676\u754c\uff08\u03a3\u5b6a\u6676\u754c\uff09<\/td>\u754c\u9762\u5de5\u7a0b\u3001\u6297\u8150\u8680\u6027\u80fd\u3001\u65ad\u88c2\u8def\u5f84\u5206\u6790<\/td><\/tr>
\u7269\u76f8\u9274\u5b9a<\/strong><\/td>\u6676\u4f53\u7ed3\u6784\u8bc6\u522b\u3001\u76f8\u5206\u5e03\u56fe<\/td>\u591a\u76f8\u6750\u6599\u6210\u5206\u5206\u5e03\u3001\u76f8\u53d8\u7814\u7a76<\/td><\/tr>
\u5e94\u529b<\/strong>\/<\/strong>\u5e94\u53d8<\/strong><\/td>\u5c40\u57df\u53d6\u5411\u5dee\uff08KAM\uff09\u3001\u51e0\u4f55\u5fc5\u8981\u4f4d\u9519\u5bc6\u5ea6<\/td>\u6b8b\u4f59\u5e94\u529b\u5206\u5e03\u3001\u5851\u6027\u53d8\u5f62\u7a0b\u5ea6\u8bc4\u4f30<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

EBSD<\/strong>\u4e3b\u8981\u5e94\u7528\u9886\u57df<\/strong><\/strong><\/p>\n\n\n\n

1. <\/strong>\u91d1\u5c5e\u6750\u6599\u5de5\u7a0b<\/strong><\/strong><\/p>\n\n\n

    \n
  • \n研究问题<\/strong>：热处理工艺对晶粒细化的影响、冷变形后的再结晶行为、增材制造熔池内的晶体生长取向<\/li>\n\n\n\n
  • \n典型应用<\/strong>：钢铁、铝合金、钛合金、高温合金<\/li>\n<\/ul>\n\n\n\n

    2. <\/strong>\u5fae\u7535\u5b50\u4e0e\u5c01\u88c5<\/strong><\/strong><\/p>\n\n\n

      \n
    • \n研究问题<\/strong>：互连线（焊点\/凸点）的电迁移失效与晶界关系、薄膜沉积质量、器件局部应力集中<\/li>\n\n\n\n
    • \n典型应用<\/strong>：焊点可靠性分析、硅片微区取向、金属互连层<\/li>\n<\/ul>\n\n\n\n

      3. <\/strong>\u5730\u8d28\u4e0e\u77ff\u7269\u5b66<\/strong><\/strong><\/p>\n\n\n

        \n
      • \n研究问题<\/strong>：岩石变形机制、矿物晶体优选定向（CPO）、相变反应历史<\/li>\n\n\n\n
      • \n典型应用<\/strong>：石英\/橄榄石\/长石的取向分析、陨石微观结构<\/li>\n<\/ul>\n\n\n\n

        4. <\/strong>\u65b0\u80fd\u6e90\u6750\u6599<\/strong><\/strong><\/p>\n\n\n

          \n
        • \n研究问题<\/strong>：电极材料充放电循环后的结构退化、固态电解质晶界电导率差异<\/li>\n\n\n\n
        • \n典型应用<\/strong>：锂电池正极材料（NMC、LFP）、固态电池界面<\/li>\n<\/ul>\n\n\n\n

          5. <\/strong>\u5148\u8fdb\u9676\u74f7\u4e0e\u590d\u5408\u6750\u6599<\/strong><\/strong><\/p>\n\n\n

            \n
          • \n研究问题<\/strong>：晶界相分布、异质界面取向关系、裂纹扩展路径与晶界类型关联<\/li>\n\n\n\n
          • \n典型应用<\/strong>：晶界相分布与界面反应产物鉴定、异质界面取向关系测定<\/li>\n<\/ul>\n\n\n\n

            \u6848\u4f8b\u5c55\u793a<\/strong><\/strong><\/p>\n\n\n\n

            \u76f8\u5206\u6790<\/strong><\/strong><\/td>\u53d6\u5411\u5206\u6790<\/strong><\/strong><\/td>\u5e94\u53d8\u5206\u6790<\/strong><\/td><\/tr>
            <\/strong><\/td><\/strong><\/td><\/strong><\/td><\/tr>
            EBSD \u7269\u76f8\u9274\u5b9a\u793a\u610f<\/td>\u94dd\u5408\u91d1\u6676\u7c92\u5f62\u72b6\u53ca\u53d6\u5411\u5206\u5e03<\/td>\u5f62\u53d8\u4e0e\u518d\u7ed3\u6676<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

            \u8bbe\u5907\u578b\u53f7\u53ca\u53c2\u6570<\/strong><\/p>\n\n\n\n

            \u540d\u79f0<\/strong><\/strong><\/td>\u751f\u4ea7\u5382\u5bb6\u53ca\u8bbe\u5907\u578b\u53f7<\/strong><\/strong><\/td>\u6280\u672f\u6307\u6807<\/strong><\/strong><\/td>\u529f\u80fd\u7279\u8272<\/strong><\/strong><\/td><\/tr>
            SEM<\/strong><\/td>
            \u8521\u53f8Gemini 500<\/strong><\/td>            		\u7535\u5b50\u67aa\uff1a\u8096\u7279\u57fa\u70ed\u573a\u53d1\u5c04\u706f\u4e1d\u5206\u8fa8\u7387\uff1a0.6 nm@15 KV\uff1b1.1 nm@1 KV\uff1b1.2 nm@0.5 KV\u653e\u5927\u500d\u7387\uff1a20 \u00d7 – 2,000,000 \u00d7\u52a0\u901f\u7535\u538b\uff1a0.02 kV – 30 kV\u63a2\u9488\u675f\u6d41\uff1a3 pA – 20 nA<\/td>\u56fe\u50cf\u5206\u8fa8\u7387\u9ad8\u80fd\u8c31\u9762\u79ef\u5927\u3001\u6548\u679c\u597dEBSD\u91c7\u96c6\u901f\u5ea6\u5feb\u3001\u65f6\u95f4\u77edLAM\u5927\u9762\u79ef\u62fc\u63a5EBSD\/EDS<\/td><\/tr>
            EBSD<\/strong><\/td>
            \u725b\u6d25Symmetry<\/strong><\/td>            		\u4fe1\u53f7\u51fa\u5c04\u6df1\u5ea6:<20nm\u7a7a\u95f4\u5206\u8fa8\u7387\uff1a>50nm\u89d2\u5206\u8fa8\u7387\uff1a0.1~1\u00b0\u6700\u5c0f\u675f\u6d41\u8981\u6c42\uff1a0.1A\u6700\u5c0f\u52a0\u901f\u7535\u538b\uff1a3kV\u5de5\u4f5c\u8ddd\u79bb\uff1a7-40mm\u6700\u5feb\u6570\u636e\u91c7\u96c6\u901f\u5ea6\uff1a4500Hz<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

            \u6837\u54c1\u5236\u5907\u6d41\u7a0b<\/strong><\/strong><\/p>\n\n\n

              \n
            • 机械抛光后振动抛光<\/li>\n\n\n\n
            • 电解抛光<\/li>\n\n\n\n
            • 离子刻蚀（截面抛光）<\/li>\n<\/ul>\n\n\n\n

              \u5236\u6837\u65b9\u6cd5\u9009\u62e9\u6307\u5357<\/strong><\/strong><\/p>\n\n\n\n

              \u6750\u6599\u7c7b\u578b<\/strong><\/strong><\/td>\u63a8\u8350\u5236\u6837\u65b9\u6cd5<\/strong><\/strong><\/td>\u5907\u6ce8<\/strong><\/strong><\/td><\/tr><\/thead>
              \u5355\u76f8\u91d1\u5c5e\uff08\u94a2\u94c1\u3001\u94dd\u5408\u91d1\u7b49\uff09<\/strong><\/td>\u673a\u68b0\u629b\u5149+\u7535\u89e3\u629b\u5149<\/td>\u5feb\u901f\u3001\u6210\u672c\u4f4e\uff0c\u9002\u5408\u5927\u6279\u91cf<\/td><\/tr>
              \u591a\u76f8\u91d1\u5c5e<\/strong>\/<\/strong>\u5408\u91d1<\/strong><\/td>\u673a\u68b0\u629b\u5149+\u632f\u52a8\u629b\u5149 \/ \u6c29\u79bb\u5b50\u629b\u5149<\/td>\u907f\u514d\u5404\u76f8\u629b\u5149\u901f\u7387\u5dee\u5f02\u5bfc\u81f4\u6d6e\u51f8<\/td><\/tr>
              \u9676\u74f7\u6750\u6599<\/strong><\/td>\u673a\u68b0\u629b\u5149+\u6c29\u79bb\u5b50\u629b\u5149<\/td>\u79bb\u5b50\u629b\u5149\u53ef\u53bb\u9664\u673a\u68b0\u635f\u4f24\u5c42<\/td><\/tr>
              \u91d1\u5c5e\u57fa\u590d\u5408\u6750\u6599<\/strong><\/td>\u6c29\u79bb\u5b50\u629b\u5149<\/td>\u517c\u987e\u91d1\u5c5e\u4e0e\u589e\u5f3a\u76f8<\/td><\/tr>
              \u8584\u819c\u6837\u54c1<\/strong><\/td>\u5e73\u6574\u5ea6\u8db3\u591f\u53ef\u76f4\u63a5\u6d4b<\/td>\u8584\u819c\u539a\u5ea6>50 nm\uff0c\u8868\u9762\u65e0\u5e94\u529b<\/td><\/tr>
              \u8f6f\u91d1\u5c5e\uff08\u94dd\u3001\u94dc\u3001\u950c\u7b49\uff09<\/strong><\/td>\u632f\u52a8\u629b\u5149\/\u7535\u89e3\u629b\u5149<\/td>\u907f\u514d\u673a\u68b0\u5212\u4f24\u548c\u5e94\u529b\u5c42<\/td><\/tr>
              \u786c\u8106\u6750\u6599<\/strong><\/td>\u7cbe\u5bc6\u5207\u5272+\u4f4e\u901f\u629b\u5149+\u79bb\u5b50\u629b\u5149<\/td>\u9632\u6b62\u788e\u88c2\u548c\u5d29\u8fb9<\/td><\/tr><\/tbody><\/table><\/figure>\n","protected":false},"excerpt":{"rendered":"

              \u7535\u5b50\u80cc\u6563\u5c04\u884d\u5c04\uff08Electron Backscatter Diffraction\uff0c\u7b80\u79f0EBSD\uff09\uff0c\u662f\u5b89\u88c5\u5728\u626b\u63cf […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1],"tags":[],"class_list":["post-236","post","type-post","status-publish","format-standard","hentry","category-1"],"_links":{"self":[{"href":"https:\/\/www.huolanlab.com\/index.php\/wp-json\/wp\/v2\/posts\/236","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.huolanlab.com\/index.php\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.huolanlab.com\/index.php\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.huolanlab.com\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.huolanlab.com\/index.php\/wp-json\/wp\/v2\/comments?post=236"}],"version-history":[{"count":1,"href":"https:\/\/www.huolanlab.com\/index.php\/wp-json\/wp\/v2\/posts\/236\/revisions"}],"predecessor-version":[{"id":238,"href":"https:\/\/www.huolanlab.com\/index.php\/wp-json\/wp\/v2\/posts\/236\/revisions\/238"}],"wp:attachment":[{"href":"https:\/\/www.huolanlab.com\/index.php\/wp-json\/wp\/v2\/media?parent=236"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.huolanlab.com\/index.php\/wp-json\/wp\/v2\/categories?post=236"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.huolanlab.com\/index.php\/wp-json\/wp\/v2\/tags?post=236"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}